Comparison ledger
KLA .496 PSL Wafer, Rigaku MiniFlex II Benchtop, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MiniFlex II BenchtopRigaku | |
|---|---|---|
| OEM | KLA | Rigaku |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Rigaku MiniFlex |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Tool type | — | Benchtop X-ray diffractometer[3] |
| Power | — | 50/60 Hz[3] |
| Electrical input | — | 100/115 Vac[3] |
| Measurement applications | — | Diffraction pattern comparison of polycrystalline materials such as powder samples and metal plates; qualitative and quantitative analyses; quality management of raw materials and products[4] |
| Sample changer | — | Automated six sample changer[4] |
| Monochromator option | — | Monochromator addition that captures X-rays other than Cu Kα[4] |
| Goniometer type | — | Vertical[4] |
| Goniometer radius | — | 150 mm[4] |
| Scanning axis | — | θ/2θ interlocked[4] |
| Detector scintillator | — | NaI (T1)[4] |
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