Comparison ledger
KLA .496 PSL Wafer, Veeco AFM-R1, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AFM-R1Veeco | |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Veeco AFM-R1 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| equipment type | — | Gloveboxed atomic force microscope[3] |
| Purpose | — | Scanning probe microscopy of semiconductor samples[4] |
| Vendor | — | Veeco Instruments Inc.[4] |
| Model | — | DiInnova[4] |
| System location | — | RAC1 inert atmosphere lab at the Quantum-Nano Fabrication and Characterization Facility at the University of Waterloo[5] |
| Environment | — | Installed in an ambient-controlled glovebox[6] |
| Operation mode | — | Tapping/contact mode[4] |
| Additional modes | — | Conductive and magnetic mapping modes[4] |
| Large area scanner default configuration | — | < 90 µm × 90 µm[4] |
| Maximum Z-range | — | < 7.5 µm[4] |
| Optional small area scanner | — | < 5 µm × 5 µm[4] |
| Optional small area scanner Z-range | — | < 1.5 µm[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →