Veeco
AFM-R1
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Veeco AFM-R1 is a gloveboxed atomic force microscope. The Veeco AFM-R1 is used for scanning probe microscopy in inert atmosphere. The Veeco AFM-R1 has tapping/contact mode and conductive and magnetic mapping modes.[1][2][3]
Where it fits in the process flow
The Veeco AFM-R1 is part of the RAC1 inert atmosphere fabrication lab, which also includes a thermal evaporator, a reactive ion etcher, a scanning electron microscope with Nabity pattern generator, a specialized 2D material assembly system, an optical profiler, a microscope, a glovebox Raman microscope, and a stylus profiler. The RAC1 inert atmosphere fabrication lab uses interconnected gloveboxes and antechambers, and the complete fabrication process can be carried out without leaving the inert environment. The RAC1 inert atmosphere fabrication lab is under an inert nitrogen environment and maintains less than 0.1 PPM oxygen.[1]
Applications
The Veeco AFM-R1 is intended for scanning probe microscopy of semiconductor samples. The Veeco AFM-R1 is used for high resolution topographical scans of sample surfaces and for area mapping in additional analytical modes.[3]
What do the numbers mean?
Configuration & options12
- System location
- RAC1 inert atmosphere lab at the Quantum-Nano Fabrication and Characterization Facility at the University of Waterloo[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What model is the Veeco AFM-R1 system?
The Veeco AFM-R1 is a Veeco DiInnova system.[3]
How does the Veeco AFM-R1 move the sample during scanning?
The Veeco AFM-R1 scans samples beneath a stationary probe on a stage connected to a piezo tube. The piezo tube scanner performs finely controlled sample movement in the X, Y and Z directions.[3]
Not publicly documented
The following facts about the AFM-R1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AFM-R1 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AFM-R1 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AFM-R1 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AFM-R1 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AFM-R1 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
- [2]qnfcf.uwaterloo.ca — qnfcf.uwaterloo.caqnfcf.uwaterloo.ca
- [3]uwaterloo.ca — uwaterloo.cauwaterloo.ca
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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