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Veeco

AFM-R1

Metrology & InspectionVeeco AFM-R1 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Veeco AFM-R1 is a gloveboxed atomic force microscope in the RAC1 inert atmosphere lab at the University of Waterloo’s Quantum-Nano Fabrication and Characterization Facility.[1]

How it works

It is located in a lab system that is under an inert nitrogen environment and that maintains less than 0.1 PPM level of oxygen. The lab uses interconnected gloveboxes and antechambers, and the equipment in the lab is linked together via these gloveboxes.[1]

Where it fits in the process flow

The AFM is part of a broader fabrication suite in the RAC1 inert atmosphere lab. The lab also includes a thermal evaporator, a reactive ion etcher, a scanning electron microscope with Nabity pattern generator, a specialized 2D material assembly system, and other gloveboxed tools.[1]

Applications

The lab is used for complete fabrication processes carried out without leaving the inert glovebox environment. The AFM is one of the tools available alongside equipment for thermal evaporation, reactive ion etching, electron beam lithography, 2D material assembly, optical profiling, microscopy, Raman microscopy, and stylus profiling.[1]

What do the numbers mean?

Configuration & options1

equipment type
Gloveboxed atomic force microscope[1]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of instrument is the Veeco AFM-R1?

It is a gloveboxed atomic force microscope.[1]

Where is the Veeco AFM-R1 located?

It is in the RAC1 inert atmosphere lab at the Quantum-Nano Fabrication and Characterization Facility at the University of Waterloo.[1]

What environment surrounds the AFM-R1?

The lab is under an inert nitrogen environment and maintains less than 0.1 PPM level of oxygen.[1]

What other equipment is in the same lab?

The lab includes a thermal evaporator, a reactive ion etcher, a scanning electron microscope with Nabity pattern generator, a specialized 2D material assembly system, an optical profiler, a microscope, a glovebox Raman microscope, and a stylus profiler.[1]

Not publicly documented

The following facts about the AFM-R1 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • Fewer than 3 independently cited specifications for the AFM-R1 are on record; the remainder await public documentation.

    Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AFM-R1 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the AFM-R1 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the AFM-R1 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the AFM-R1 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]uwaterloo.cauwaterloo.cauwaterloo.ca
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Last updated Jul 29, 2026.

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