Comparison ledger
KLA .498 PSL Wafer, KLA Surfscan SP 2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Surfscan |
| Specifications | ||
| Configuration | NIST Traceable[1] | Dual FIMS Loader[2] |
| NIST traceability | Yes[1] | — |
| OEM | KLA[1] | KLA[2] |
| Category | Metrology & Inspection[1] | — |
| Traceability | Yes[1] | — |
| Description | Particle-sizing calibration standard[1] | — |
| Model | — | Surfscan SP 2[2] |
| Wafer sizes | — | 8 inch, 12 inch[2] |
| Loader | — | Dual FIMS loader[2] |
| Ports | — | Single 300 mm port / single 200 mm port[2] |
| Family module | — | SURFmonitor optional module provides full-wafer maps correlated to film properties for blanket films[3] |
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