KLA
Surfscan SP 2
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The KLA Surfscan SP 2 is configured for 8 inch and 12 inch wafers. The KLA Surfscan SP 2 can be equipped with a dual FIMS loader with a single 300 mm port and a single 200 mm port. The Surfscan SP2-family supports an optional SURFmonitor module that provides full-wafer maps correlated to film properties for blanket films.[1][2]
How it works
The optional SURFmonitor module for Surfscan SP2-family systems provides full-wafer maps that correlate to film properties for blanket films.[2]
Where it fits in the process flow
General reference — not yet source-verifiedInspection and metrology tools of this class operate between process steps to verify wafer condition and to monitor excursions before additional value is added downstream. Surface-inspection results are commonly used around deposition, etch, clean, and other module areas where particles and surface defects influence later patterning, electrical behavior, and yield.
Applications
The SURFmonitor option for Surfscan SP2-family systems is used for blanket-film applications that require full-wafer maps correlated to film properties.[2]
What do the numbers mean?
Wafer handling4
Configuration & options4
- Single 300 mm Port / Single 200 mm Port[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Surfscan SP 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 2 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 2 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan SP 2 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan SP 2 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan SP 2 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]web.archive.org — kla-tencor.com (Mar 6, 2009)web.archive.org
Last updated Oct 16, 2026.
Compare with similar tools
View all →The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.
