Comparison ledger
KLA 5100 Overlay Measurement and KLA P 16 +, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P 16 +KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 5100 | KLA P 16 + |
| Specifications | ||
| OS | VMS[1] | — |
| Configuration | Windows NT / VAX software[1] | 2A, 20in Hg @ 1cfm[2] |
| Phase | — | 1 Phase[2] |
| Software | — | (OS) version 7.31.05 [Build 5][2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →