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Comparison ledger

AIT II Defect versus FLX 2320

KLA AIT II Defect and KLA FLX 2320, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
AIT II DefectKLA
FLX 2320KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA AITKLA FLX 2320
Specifications
Software Version5.3.20.4[1]4.4[2]
CIMSECS, GEM[1]—
Handler SystemDual[1]—
Factory InterfaceOpen Cassette[1]—
Configuration—Refurbished[2]
Dual Wavelength Scanning—670 nm, 785 nm[2]
Operation Manual—Digital Copy[2]
AIT II Defect entryFLX 2320 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing