Waferpedia

Comparison ledger

AIT II Defect versus P-15

KLA AIT II Defect and KLA P-15, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
AIT II DefectKLA
P-15KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA AITKLA P-15
Specifications
Software Version5.3.20.4[1]—
CIMSECS, GEM[1]—
Handler SystemDual[1]—
Factory InterfaceOpen Cassette[1]—
Sample table—200 mm sample table with vacuum[2]
Measurement range—Measures steps from 100 Å to 300 µm[2]
Maximum sample thickness—20 mm[2]
Minimum sample length—25 mm[2]
AIT II Defect entryP-15 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.ece.cmu.edunanofab.ece.cmu.edu