Waferpedia

KLA

P-15

Metrology & Inspection200mmKLA P-15 family
Research Quality: 20% complete
KLAP-15
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  • Plate 01KLA Tencor P 15 Profiler #62240

    Bid ServicellcWatch on YouTube
  • Plate 02KLA Tencor P-15 Wafer Surface Profilometer System w/ Computer USED (7289)R

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  • Plate 03Kel-Tec P15: The Smallest, Lightest Doublestack 9mm

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  • Plate 04What’s your opinion on the Kel-Tec P15 9mm?

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  • Plate 05Refublished KLA Tencor P15 中古段差測定器

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  • Plate 06What Do You Guys Think About The New Budget Friendly Kel-Tec P15? Cop or Drop? #Viral #Fyp #Ytshorts

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Wafer size

200mm

Vacuum

200 mm sample table with vacuum[1]

What is it?

The source describes the KLA Tencor P-15 Profilometer and lists it as having a 200 mm sample table with vacuum, measuring steps from 100 Å to 300 µm, a maximum sample thickness of 20 mm, and a minimum sample length of 25 mm.

What do the numbers mean?

Vacuum & pumping1

Sample table
200 mm sample table with vacuum[1]
Accurate?

Configuration & options3

Measurement range
Measures steps from 100 Å to 300 µm[1]
Accurate?
Maximum sample thickness
20 mm[1]
Accurate?
Minimum sample length
25 mm[1]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Sample table200 mm sample table with vacuum[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the P-15 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P-15 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the P-15 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P-15 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P-15 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P-15 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanofab.ece.cmu.edunanofab.ece.cmu.edunanofab.ece.cmu.edu
  2. [2]egr.vcu.eduegr.vcu.edu
  3. [3]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon Universitynanofab.ece.cmu.edunanofab.ece.cmu.edu
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Last updated Jul 29, 2026.

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