Waferpedia

Comparison ledger

AIT XUV Darkfield versus P 16 +

KLA AIT XUV Darkfield and KLA P 16 +, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
AIT XUV DarkfieldKLA
P 16 +KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA AIT XUVKLA P 16 +
Specifications
Software Version6.3.24.3[1]—
CIMSECS / GEM[1]—
Factory SystemFOUPS[1]—
Handler SystemRobot[1]—
ConfigurationPillar[1]2A, 20in Hg @ 1cfm[2]
Missing PartsIncomplete Wafer Handler Module & Inspection Module[1]—
Phase—1 Phase[2]
Software—(OS) version 7.31.05 [Build 5][2]
AIT XUV Darkfield entryP 16 + entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing