Comparison ledger
KLA Alpha Step IQ Contact and KLA FLX 2320, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | FLX 2320KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Alpha Step IQ Contact | KLA FLX 2320 |
| Specifications | ||
| Configuration | — | Refurbished[1] |
| Dual Wavelength Scanning | — | 670 nm, 785 nm[1] |
| Software Version | — | 4.4[1] |
| Operation Manual | — | Digital Copy[1] |
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