Comparison ledger
KLA Altair 8900 Defect and KLA eDR 5210 DR-SEM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Altair 8900 Defect | KLA eDR |
| Specifications | ||
| Configuration | For CMOS Image Sensor Applications[1] | 2 Load Port (Brooks FixLoad)[2] |
| Module | Two Main Devices and a Set of UPS[1] | — |
| Wires | 5, Phases: 3[1] | — |
| Max AIC | 10,000[1] | — |
| Volts AC | 208 V[1] | — |
| Amps | 25[1] | — |
| Freq | 50 / 60 Hz[1] | — |
| SCCR (A) | 5,000[1] | — |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →