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Comparison ledger

Altair 8920 i Patterned Wafer Particle Defect versus eS 32 E-Beam

KLA Altair 8920 i Patterned Wafer Particle Defect and KLA eS 32 E-Beam, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Altair 8920 i Patterned Wafer Particle DefectKLA
eS 32 E-BeamKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Altair 8920KLA eS 32 E-Beam
Specifications
Voltage208 VAC[1]—
Configuration50/60 Hz[1]12"[2]
Phase3 Phase[1]—
Altair 8920 i Patterned Wafer Particle Defect entryeS 32 E-Beam entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing