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KLA

Altair 8920 i Patterned Wafer Particle Defect

Metrology & InspectionKLA Altair 8920 family
Research Quality: 30% complete
Altair 8920 i Patterned Wafer Particle Defect — Inventory photo
Fig. 01Altair 8920 i Patterned Wafer Particle DefectInventory photo[1]

What is it?

The KLA Altair 8920 i is a patterned wafer particle defect system.

What do the numbers mean?

Power & electrical3

Voltage
208 VAC[1]
Accurate?
50/60 Hz[1]
Accurate?
Phase
3 Phase[1]
Accurate?

Configuration & options1

5 Wire[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208 VAC[1]
  • Configuration50/60 Hz[1]
  • Phase3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the KLA Altair 8920 i?

It is a patterned wafer particle defect system.[2][1]

Not publicly documented

The following facts about the Altair 8920 i Patterned Wafer Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Altair 8920 i Patterned Wafer Particle Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Altair 8920 i Patterned Wafer Particle Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Altair 8920 i Patterned Wafer Particle Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Altair 8920 i Patterned Wafer Particle Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Altair 8920 i Patterned Wafer Particle Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
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Last updated Jul 29, 2026.

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