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Altair 8920 i Patterned Wafer Particle Defect versus P-2

KLA Altair 8920 i Patterned Wafer Particle Defect and KLA P-2, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Altair 8920 i Patterned Wafer Particle DefectKLA
P-2KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Altair 8920KLA P-2
Specifications
Voltage208 VAC[1]—
Configuration50/60 Hz[1]—
Phase3 Phase[1]—
Model—P-2[2]
OEM—KLA Tencor[2]
Equipment type—Profilometer[2]
Sample table—200 mm sample table with vacuum[3]
Measurement range—Measures steps from 100 Å to 300 µm[3]
Maximum sample thickness—20 mm[3]
Minimum sample length—25 mm[3]
Feature—3D scan option[3]
Altair 8920 i Patterned Wafer Particle Defect entryP-2 entry

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.ece.cmu.edunanofab.ece.cmu.edu
  3. [3]nanofab.ece.cmu.edunanofab.ece.cmu.edu