Waferpedia

Comparison ledger

Altair 8920 i Patterned Wafer Particle Defect versus UV 1280 SE Thin Film Thickness Measurement

KLA Altair 8920 i Patterned Wafer Particle Defect and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA Altair 8920KLA UV 1280 SE Thin Film Thickness Measurement
Specifications
Voltage208 VAC[1]200 V[2]
Configuration50/60 Hz[1]Single phase[2]
Phase3 Phase[1]
Power1.8 kW[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing