Comparison ledger
KLA Archer 10 XT Overlay and KLA P/N: 0224471-001 or 365998 30mW Ar, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | KLA P/N: 0224471-001 or 365998 30mW Ar |
| Specifications | ||
| Configuration | During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1] | Compatible with KLA 6200, 6220, 6400 and 6420[2] |
| Wafer size | 200mm dual port open wafer handler[1] | — |
| JDSU/Lumentum P/N | — | 2214-30SLQTA[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →