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Archer 10 XT Overlay versus Prometrix UV 1250 SE Film Thickness Measurement

KLA Archer 10 XT Overlay and KLA Prometrix UV 1250 SE Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA ArcherKLA UV 1250 SE
Specifications
ConfigurationDuring refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1]120 Volt[2]
Wafer size200mm dual port open wafer handler[1]
Phase1 Phase[2]
Software Version2.4[2]
Robot TypeKLA H2D[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing