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Comparison ledger

Archer 10 XT Overlay versus Surfscan SP 3 Particle Defect

KLA Archer 10 XT Overlay and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Archer 10 XT OverlayKLA
Surfscan SP 3 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mmBare wafer inspection station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ArcherKLA Surfscan
Specifications
ConfigurationDuring refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1]HDD not included[2]
Wafer size200mm dual port open wafer handler[1]Bare wafer inspection station[2]
Archer 10 XT Overlay entrySurfscan SP 3 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing