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Archer XT+ Overlay Measurement versus FLX 2320

KLA Archer XT+ Overlay Measurement and KLA FLX 2320, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Archer XT+ Overlay MeasurementKLA
FLX 2320KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ArcherKLA FLX 2320
Specifications
Software version5.60[1]—
ConfigurationNew / Refurbished Items:[1]Refurbished[2]
New system consumable partsShutter, HLS Lamp & Air Filters[1]—
Dual Wavelength Scanning—670 nm, 785 nm[2]
Software Version—4.4[2]
Operation Manual—Digital Copy[2]
Archer XT+ Overlay Measurement entryFLX 2320 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing