Comparison ledger
KLA Archer XT+ Overlay Measurement and KLA P 16 + Profiler, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | KLA P |
| Specifications | ||
| Software version | 5.60[1] | — |
| Configuration | New / Refurbished Items:[1] | Refurbished[2] |
| New system consumable parts | Shutter, HLS Lamp & Air Filters[1] | — |
| Option | — | Stress, 3D. GEM / SECS[2] |
| Stage | — | Fully Motorized X-Y,Z, Theta, Level Stage[2] |
| Stylus | — | 2 um / 60D[2] |
| OS | — | Windows XP[2] |
| Software | — | Profiler V 7.35[2] |
| Vertical Range | — | 327 um[2] |
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