Waferpedia

KLA

P 16 + Profiler

Metrology & InspectionKLA P family
Research Quality: 30% complete
P 16 + Profiler — Inventory photo
Fig. 01P 16 + ProfilerInventory photo[1]

What is it?

KLA P 16 + Profiler is a metrology and inspection tool with listed wafer sizes from 2 inch to 12 inch.

What do the numbers mean?

Control & software1

Software
Profiler V 7.35[1]
Accurate?

Configuration & options8

Refurbished[1]
Accurate?
Stress, 3D. GEM / SECS[1]
Accurate?
Stage
Fully Motorized X-Y,Z, Theta, Level Stage[1]
Accurate?
Stylus
2 um / 60D[1]
Accurate?
OS
Windows XP[1]
Accurate?
Vertical Range
327 um[1]
Accurate?
Upgrade to SSD[1]
Accurate?
PDF Manual[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the P 16 + Profiler are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 16 + Profiler are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the P 16 + Profiler are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P 16 + Profiler are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 16 + Profiler are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 16 + Profiler is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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