Comparison ledger
KLA Archer XT+ Overlay Measurement and KLA Viper 2401 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | KLA Viper |
| Specifications | ||
| Software version | 5.60[1] | — |
| Configuration | New / Refurbished Items:[1] | 50/60 Hz[2] |
| New system consumable parts | Shutter, HLS Lamp & Air Filters[1] | — |
| Phase | — | 1 Phase[2] |
| Supply Voltage | — | 100-200, 200-240 V[2] |
| Interrupt Capacity | — | 10,000 Amps[2] |
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