KLA
Viper 2401 Defect
The KLA Viper 2401 Defect is a Metrology & Inspection tool. The KLA Viper 2401 Defect is specified for 1 Phase operation. The KLA Viper 2401 Defect has a supply voltage of 100-200 or 200-240 V.[1]
What it is
General reference — not yet source-verifiedDefect inspection systems are used in semiconductor manufacturing to examine wafers for unwanted pattern defects, particles, and other surface anomalies. Defect inspection tools are part of the fab metrology and yield management infrastructure. Defect inspection tools generally provide information that engineers use to monitor process health and identify excursions.
How it works
The KLA Viper 2401 Defect is configured for 1 phase power. The KLA Viper 2401 Defect is specified for 50/60 Hz operation. The KLA Viper 2401 Defect is specified for supply voltage ranges of 100-200 V and 200-240 V. The KLA Viper 2401 Defect is specified with interrupt capacity of 10,000 amps.[1][2][3]
Where it fits in the process flow
General reference — not yet source-verifiedDefect inspection tools are used between process steps to check wafer condition after patterning, deposition, etch, clean, and related module operations. Defect inspection tools help connect observed defect signatures with upstream process modules. Defect inspection results can guide engineering review, process adjustment, and disposition decisions for lots under evaluation.
Applications
General reference — not yet source-verifiedDefect inspection systems are applied to patterned and unpatterned wafer monitoring in semiconductor process development and production. Defect inspection systems are used to detect particles, pattern issues, and surface anomalies that can affect device yield. Defect inspection systems support excursion detection, baseline monitoring, and troubleshooting across multiple wafer fabrication modules.
What do the numbers mean?
Power & electrical4
- 50/60 Hz[1]
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What equipment category does the KLA Viper 2401 Defect belong to?
The KLA Viper 2401 Defect belongs to the Metrology & Inspection category.[2][3]
What family is the KLA Viper 2401 Defect part of?
The KLA Viper 2401 Defect is part of the KLA Viper family.[2][3]
What power phase is specified for the KLA Viper 2401 Defect?
The KLA Viper 2401 Defect is specified for 1 phase power.[1][2][3]
What frequency is specified for the KLA Viper 2401 Defect?
The KLA Viper 2401 Defect is specified for 50/60 Hz operation.[1][2][3]
Not publicly documented
The following facts about the Viper 2401 Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Viper 2401 Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Viper 2401 Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Viper 2401 Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Viper 2401 Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Viper 2401 Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]KLA P-2 vs KLA Viper 2401 Defect comparison | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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