Waferpedia

Comparison ledger

Candela CS 10 R CS 10 V Wafer versus P-15

KLA Candela CS 10 R CS 10 V Wafer and KLA P-15, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
Candela CS 10 R CS 10 V WaferKLA
P-15KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Candela CS 10KLA P-15
Specifications
Phase1 Phase[1]—
Configuration50/60 Hz[1]—
Sample table—200 mm sample table with vacuum[2]
Measurement range—Measures steps from 100 Å to 300 µm[2]
Maximum sample thickness—20 mm[2]
Minimum sample length—25 mm[2]
Candela CS 10 R CS 10 V Wafer entryP-15 entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.ece.cmu.edunanofab.ece.cmu.edu