Waferpedia

Comparison ledger

Candela CS 10 R CS 10 V Wafer versus P 16 +

KLA Candela CS 10 R CS 10 V Wafer and KLA P 16 +, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA Candela CS 10KLA P 16 +
Specifications
Phase1 Phase[1]1 Phase[2]
Configuration50/60 Hz[1]2A, 20in Hg @ 1cfm[2]
Software(OS) version 7.31.05 [Build 5][2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing