Waferpedia

Comparison ledger

eS 32 E-Beam versus Surfscan 6220

KLA eS 32 E-Beam and KLA Surfscan 6220, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
eS 32 E-BeamKLA
Surfscan 6220KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA eS 32 E-BeamKLA Surfscan 6220
Specifications
Configuration12"[1]Single Phase[2]
Frequency—60 Hz[2]
Voltage—208 V[2]
eS 32 E-Beam entrySurfscan 6220 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing