KLA
Surfscan 6220
What it is
How it works
Applications
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
- KLA Surfscan 6220 SBC UpgradeIn Productionsource[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of tool is the Surfscan 6220?General reference — not yet source-verified
It is a wafer inspection and metrology tool used to find and characterize surface defects on production substrates.
What does this class of machine measure?General reference — not yet source-verified
It measures optical responses from the surface and converts them into defect locations, defect classifications, and related inspection data.
Where is this equipment used in manufacturing?General reference — not yet source-verified
It is used in the inspection part of the process flow, typically between fabrication steps or after critical operations that can introduce defects.
Why is this class of system important?General reference — not yet source-verified
It supports yield control by finding contamination, surface damage, and process excursions before they propagate through later steps.
Not publicly documented
The following facts about the Surfscan 6220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6220 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment inventory listing
- [3]KLA Surfscan 6220 Wafer Particle Detection System for sale — fabsurplus.comfabsurplus.com
- [4]KLA-Tencor Surfscan 6220 Particle Inspection | Used | ClassOne — classoneequipment.comclassoneequipment.com
- [5]KLA-TENCOR SURFSCAN 6220 | SemiStar — semistarcorp.comsemistarcorp.com
- [6]Kla/tencor SURFSCAN 6220 Unpatterned Surface Inspection System. Specifications: Substrate/sizes: 2 In., 3 In., 82, 100, 125, 150, 200mm. Thickness: Semi Standard Wafer Thickn . Product Category: Semiconductor, Sub Category: Metrology And Inspection Refurbished — yorkscientific.comyorkscientific.com
- [7]KLA Tencor | Certified Used Equipment | Opti-Probe® 3291 (DUV) — kla-tencor.com (Jan 24, 2010)web.archive.org
Last updated Jul 30, 2026.
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