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Flexus F 2320 I Stress Measurementversus03 RR 8120-001-001 Wafer Exchanger

KLA Flexus F 2320 I Stress Measurement, Rorze 03 RR 8120-001-001 Wafer Exchanger, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLARorze
CategoryTest & ProbeTest & Probe
Wafer size6"—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones1991 Vintage—
Control system——
Generation——
FamilyKLA Flexus F 2320 I Stress MeasurementRorze 03 RR 8120-001-001 Wafer Exchanger
Specifications
ConfigurationDual Wavelength[1]—
Software Version2.0[1]—
Operating SystemMS-DOS V6.22[1]—
Voltage115V[1]—
Current10A[1]—
Wafer sizeThis system comes with an alignment/centering ring for a 6" wafer[1]8 inch[2]
Wafer Sizes6 inch, 8 inch[1]—
Vintage1991[1]—
MeasurementDual Wavelength[1]—
ManufacturerKLA[1]Rorze[2]
ModelFlexus F 2320 I[1]03 RR 8120-001-001[2]
Wafer sizes6 in, 8 in[1]—
OpticsDual Wavelength[1]—
Alignment/centering ringIncludes an alignment/centering ring for a 6" wafer[1]—
8-inch wafer alignment toolDoes not have any alignment tool for an 8" wafer[1]—
Equipment type—Wafer Exchanger[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com