KLA
Flexus F 2320 I Stress Measurement
The KLA Flexus F 2320 I Stress Measurement is a stress measurement system for semiconductor wafers. The KLA Flexus F 2320 I Stress Measurement supports 6-inch and 8-inch wafers. The KLA Flexus F 2320 I Stress Measurement uses dual wavelength measurement.[1][2][3]
What it is
How it works
Applications
What do the numbers mean?
Power & electrical1
Wafer handling6
- Wafer size
- Can accommodate and perform a stress test on an 8" wafer but does not have any alignment tool[3]
Optics & imaging3
- Dual Wavelength[3]
Control & software2
Configuration & options4
Vintage & configurations
- 1991Vintage[3]
Described as 1991 vintage.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage115V[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Flexus F 2320 I Stress Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Flexus F 2320 I Stress Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Flexus F 2320 I Stress Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Flexus F 2320 I Stress Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Flexus F 2320 I Stress Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Flexus F 2320 I Stress Measurement are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Flexus F 2320 I Stress Measurement — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [2]KLA Flexus F 2320 I Stress Measurement family | Waferpedia — waferpedia.comwaferpedia.com
- [3]Equipment inventory listing
Last updated Oct 19, 2026.
Compare with similar tools
View all →The MPI TS150 Probe Station is an electrical test probe station for wafers or chips, using MPI PM100 true X,Y,Z micro-positioners for probe mounting.
The Signatone S-460 is a 6-inch semi-automatic probe station with automated wafer stepping, motorized theta, and a quick two-point align feature.
The MPI TS150 Probe Station is designed for electrical testing on wafers or chips and supports wafers up to 6 inch.
The Tenney TPS JR-A-F4T is a junior compact temperature test chamber with a 1.2 cubic foot chamber size and a temperature range of -68°C to +180°C.