Waferpedia

KLA

Flexus F 2320 I Stress Measurement

Flexus F 2320 I Stress Measurement — Inventory photo
Fig. 01Flexus F 2320 I Stress MeasurementInventory photo[1]

Wafer size

6"

Power

115V[1]

Optics

Dual Wavelength[1]

What it is

The KLA Flexus F 2320 I is a stress measurement system for semiconductor wafers. The system supports six-inch and eight-inch wafer sizes. The system uses dual wavelength technology for stress measurement.[1]

What do the numbers mean?

Power & electrical1

Voltage
115V[1]
Accurate?

Wafer handling3

Wafer size
This system comes with an alignment/centering ring for a 6" wafer[1]
Accurate?
Wafer size
Can accommodate and perform a stress test on an 8" wafer but does not have any alignment tool[1]
Accurate?
Wafer Sizes
6 inch, 8 inch[1]
Accurate?

Optics & imaging2

Dual Wavelength[1]
Accurate?
Measurement
Dual Wavelength[1]
Accurate?

Control & software2

Software Version
2.0[1]
Accurate?
Operating System
MS-DOS V6.22[1]
Accurate?

Configuration & options2

Current
10A[1]
Accurate?
Vintage
1991[1]
Accurate?

Vintage & configurations

  1. 1991Vintage[1]

    Described as 1991 vintage.

Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What wafer sizes does the KLA Flexus F 2320 I support?

The system supports six-ich and eight-ich wafer sizes.[1]

What software version does the system use?

The system uses software version 2.0.[1]

What are the voltage and current requirements?

The system requires 115V and 10A.[1]

Does the system have dual wavelength capability?

Yes, the Flexus F 2320 I uses dual wavelength technology.[1]

Not publicly documented

The following facts about the Flexus F 2320 I Stress Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the Flexus F 2320 I Stress Measurement are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Flexus F 2320 I Stress Measurement are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Flexus F 2320 I Stress Measurement are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Flexus F 2320 I Stress Measurement is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Flexus F 2320 I Stress Measurement are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
Was this page accurate?

Last updated Aug 14, 2026.

Compare with similar tools

View all →