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Comparison ledger

FLX 2320 A versus Surfscan 6220

KLA FLX 2320 A and KLA Surfscan 6220, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
FLX 2320 AKLA
Surfscan 6220KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA Surfscan 6220
Specifications
ConfigurationThin film stress measurement system[1]Single Phase[2]
Frequency—60 Hz[2]
Voltage—208 V[2]
FLX 2320 A entrySurfscan 6220 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing