Waferpedia

Comparison ledger

FLX 2320 A versus Viper 2401 Defect

KLA FLX 2320 A and KLA Viper 2401 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA FLX 2320KLA Viper
Specifications
ConfigurationThin film stress measurement system[1]50/60 Hz[2]
Phase1 Phase[2]
Supply Voltage100-200, 200-240 V[2]
Interrupt Capacity10,000 Amps[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing