Waferpedia

Comparison ledger

FLX 2320 versus HRP 340 Thickness Measurement

KLA FLX 2320 and KLA HRP 340 Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA FLX 2320KLA HRP 340
Specifications
ConfigurationRefurbished[1]50/60 Hz[2]
Dual Wavelength Scanning670 nm, 785 nm[1]
Software Version4.4[1]
Operation ManualDigital Copy[1]
Phase1 Phase / 3 Wires[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing