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Comparison ledger

FLX 2320 versus INS 3000 DUV Defect

KLA FLX 2320 and KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
FLX 2320KLA
INS 3000 DUV DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer transport check
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA INS 3000
Specifications
ConfigurationRefurbished[1]Auto Focus check for each lens[2]
Dual Wavelength Scanning670 nm, 785 nm[1]—
Software Version4.4[1]—
Operation ManualDigital Copy[1]—
Wafer size—Wafer transport check[2]
Stage—Slight left-to-right tilt observed; minor scratches present[2]
FLX 2320 entryINS 3000 DUV Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing