Comparison ledger
KLA FLX 2320 and KLA P 22 Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | FLX 2320KLA | P 22 SurfaceKLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA FLX 2320 | KLA P |
| Specifications | ||
| Configuration | Refurbished[1] | UPI Board Only[2] |
| Dual Wavelength Scanning | 670 nm, 785 nm[1] | — |
| Software Version | 4.4[1] | — |
| Operation Manual | Digital Copy[1] | — |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →