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Comparison ledger

FLX 2320 versus RS 75 Resistivity Mapper

KLA FLX 2320 and KLA RS 75 Resistivity Mapper, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
FLX 2320KLA
RS 75 Resistivity MapperKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA RS 75
Specifications
ConfigurationRefurbished[1]220 Volts[2]
Dual Wavelength Scanning670 nm, 785 nm[1]—
Software Version4.4[1]—
Operation ManualDigital Copy[1]—
Voltage—120 V[3]
FLX 2320 entryRS 75 Resistivity Mapper entry

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing