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Comparison ledger

FLX 2320 versus Surfscan SP 3 Particle Defect

KLA FLX 2320 and KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
FLX 2320KLA
Surfscan SP 3 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Bare wafer inspection station
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA Surfscan
Specifications
ConfigurationRefurbished[1]HDD not included[2]
Dual Wavelength Scanning670 nm, 785 nm[1]—
Software Version4.4[1]—
Operation ManualDigital Copy[1]—
Wafer size—Bare wafer inspection station[2]
FLX 2320 entrySurfscan SP 3 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing