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FLX 2320 versus UV 1280 SE Thin Film Thickness Measurement

KLA FLX 2320 and KLA UV 1280 SE Thin Film Thickness Measurement, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
FLX 2320KLA
UV 1280 SE Thin Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA FLX 2320KLA UV 1280 SE Thin Film Thickness Measurement
Specifications
ConfigurationRefurbished[1]Single phase[2]
Dual Wavelength Scanning670 nm, 785 nm[1]—
Software Version4.4[1]—
Operation ManualDigital Copy[1]—
Voltage—200 V[2]
Power—1.8 kW[2]
FLX 2320 entryUV 1280 SE Thin Film Thickness Measurement entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing