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Comparison ledger

ICOS CI 9450 versus Puma 9120 Defect

KLA ICOS CI 9450 and KLA Puma 9120 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ICOS CI 9450KLA
Puma 9120 DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ICOSKLA Puma 9120
Specifications
Configuration9x50[1]User Interface Software Version 9.3.309.2.8[2]
ICOS CI 9450 entryPuma 9120 Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing