Waferpedia

KLA

Puma 9120 Defect

Metrology & InspectionKLA Puma 9120 family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

KLAPuma 9120 Defect
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What is it?

The KLA Puma 9120 Defect Inspection is a defect inspection system stated to support 8-inch and 12-inch wafers.

What do the numbers mean?

Wafer handling1

Dual open Cassette 200/300mm loader[1]
Accurate?

Control & software1

User Interface Software Version 9.3.309.2.8[1]
Accurate?

Configuration & options1

MS OS, Windows 2000[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Puma 9120 Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Puma 9120 Defect are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Puma 9120 Defect are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Puma 9120 Defect are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Puma 9120 Defect are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Puma 9120 Defect is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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