Waferpedia

Comparison ledger

ICOS CI 9450 versus Surfscan AIT 8010 Particle Defect

KLA ICOS CI 9450 and KLA Surfscan AIT 8010 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
ICOS CI 9450KLA
Surfscan AIT 8010 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ICOSKLA Surfscan
Specifications
Configuration9x50[1]Hz 50-60[2]
Software version—3.3.2.813[2]
CIM—SECS, GEM[2]
Volts—200-240[2]
Amps—30[2]
Phase—1[2]
ICOS CI 9450 entrySurfscan AIT 8010 Particle Defect entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing