Waferpedia

Comparison ledger

ILM 2139 Patterned Wafer versus Surfscan AIT 8010 Particle Defect

KLA ILM 2139 Patterned Wafer and KLA Surfscan AIT 8010 Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
ILM 2139 Patterned WaferKLA
Surfscan AIT 8010 Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA ILM 2139 Patterned WaferKLA Surfscan
Specifications
Configuration50/60 Hz[1]Hz 50-60[2]
Voltage208 V[1]—
Phase3 phase[1]1[2]
Software version—3.3.2.813[2]
CIM—SECS, GEM[2]
Volts—200-240[2]
Amps—30[2]
ILM 2139 Patterned Wafer entrySurfscan AIT 8010 Particle Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing