Waferpedia

Comparison ledger

INS 3000 DUV Defect versus P-15

KLA INS 3000 DUV Defect and KLA P-15, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
P-15KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check200mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA P-15
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]—
StageSlight left-to-right tilt observed; minor scratches present[1]—
Sample table—200 mm sample table with vacuum[2]
Measurement range—Measures steps from 100 Å to 300 µm[2]
Maximum sample thickness—20 mm[2]
Minimum sample length—25 mm[2]
INS 3000 DUV Defect entryP-15 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.ece.cmu.edunanofab.ece.cmu.edu