Waferpedia

Comparison ledger

INS 3000 DUV Defect versus P 16 + Profiler

KLA INS 3000 DUV Defect and KLA P 16 + Profiler, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
P 16 + ProfilerKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA P
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]Refurbished[2]
StageSlight left-to-right tilt observed; minor scratches present[1]Fully Motorized X-Y,Z, Theta, Level Stage[2]
Option—Stress, 3D. GEM / SECS[2]
Stylus—2 um / 60D[2]
OS—Windows XP[2]
Software—Profiler V 7.35[2]
Vertical Range—327 um[2]
INS 3000 DUV Defect entryP 16 + Profiler entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing