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Comparison ledger

INS 3000 DUV Defect versus Surfscan 6220

KLA INS 3000 DUV Defect and KLA Surfscan 6220, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
INS 3000 DUV DefectKLA
Surfscan 6220KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer sizeWafer transport check—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA INS 3000KLA Surfscan 6220
Specifications
Wafer sizeWafer transport check[1]—
ConfigurationAuto Focus check for each lens[1]Single Phase[2]
StageSlight left-to-right tilt observed; minor scratches present[1]—
Frequency—60 Hz[2]
Voltage—208 V[2]
INS 3000 DUV Defect entrySurfscan 6220 entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing