Comparison ledger
KLA P-15, KLA Puma 9130 Darkfield Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-15KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-15 | KLA Puma 9130 |
| Specifications | ||
| Sample table | 200 mm sample table with vacuum[1] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[1] | — |
| Maximum sample thickness | 20 mm[1] | — |
| Minimum sample length | 25 mm[1] | — |
| Tool type | Profilometer[2] | Darkfield defect inspection system[4] |
| Measurement capabilities | Measures roughness, waviness, step height, and other surface characteristics[3] | — |
| Wafer capability | Up to 8"/200mm wafer capable[3] | — |
| Control platform | Windows NT[3] | — |
| Software version | Profiler v6.41[3] | — |
| Automation | Computer controlled; automatic measurement capability[3] | — |
| Configuration | — | Refurbished[4] |
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