Comparison ledger
KLA P-15 and KLA Solid State, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-15KLA | Solid StateKLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA P-15 | KLA Solid State |
| Specifications | ||
| Sample table | 200 mm sample table with vacuum[1] | — |
| Measurement range | Measures steps from 100 Å to 300 µm[1] | — |
| Maximum sample thickness | 20 mm[1] | — |
| Minimum sample length | 25 mm[1] | — |
| Configuration | — | Upgrade for KLA AIT II & XP Series Systems[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →