Waferpedia

Comparison ledger

P-15 versus Surfscan 6420 Unpatterned Surface

KLA P-15 and KLA Surfscan 6420 Unpatterned Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P-15KLA
Surfscan 6420 Unpatterned SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA P-15KLA Surfscan 6420
Specifications
Sample table200 mm sample table with vacuum[1]—
Measurement rangeMeasures steps from 100 Å to 300 µm[1]—
Maximum sample thickness20 mm[1]—
Minimum sample length25 mm[1]—
Phase—1 phase[2]
Frequency—60 Hz[2]
Voltage—208V[2]
Configuration—16A[2]
P-15 entrySurfscan 6420 Unpatterned Surface entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.ece.cmu.edunanofab.ece.cmu.edu
  2. [2]inventory listing