Waferpedia

Comparison ledger

P 15 XP Surface versus Puma 9120 Defect

KLA P 15 XP Surface and KLA Puma 9120 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA PKLA Puma 9120
Specifications
ConfigurationUpgraded from P-10[1]User Interface Software Version 9.3.309.2.8[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing