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Comparison ledger

P 16 + Profiler versus RS 75 Resistivity Mapper

KLA P 16 + Profiler and KLA RS 75 Resistivity Mapper, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
P 16 + ProfilerKLA
RS 75 Resistivity MapperKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA PKLA RS 75
Specifications
ConfigurationRefurbished[1]220 Volts[2]
OptionStress, 3D. GEM / SECS[1]—
StageFully Motorized X-Y,Z, Theta, Level Stage[1]—
Stylus2 um / 60D[1]—
OSWindows XP[1]—
SoftwareProfiler V 7.35[1]—
Vertical Range327 um[1]—
Voltage—120 V[3]
P 16 + Profiler entryRS 75 Resistivity Mapper entry

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing